Cooling water temperature control for etching and sputtering
It keeps the temperature, flow rate, and discharge pressure of the cooling water in the substrate cooling plate and vacuum chamber constant.
- Product：
- Chillers
- Industry：
- Research Inst / Universities / Electrical & Precision Inst / Electronic Components & Semiconductors
- Process：
- Machining / Processing/Other Processes
Chillers
A chiller is a device that cools or regulates the temperature of a heat source by circulating water maintained at a constant temperature. It is used in a variety of applications, including Industrial Machinery, medical equipment, Chemicals equipment, and food processing machinery. It is sometimes called a chiller, chiller unit, unit cooler, or cooling water circulation system, but these are all synonymous.
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